A company delivers its first Micro LED equipment

Recently, the E&IC Division of Dehu Coating Equipment Co., Ltd. announced that its first set of precision slit coating equipment dedicated to the Micro LED field has been officially delivered; this marks an important technological breakthrough for the company in the field of new display equipment.

According to reports, the Micro LED special coating equipment delivered this time has the characteristics of high integration, high automation and compactness. At the same time, the equipment is compatible with a variety of substrate sizes and loading methods, and can integrate the entire process of substrate cleaning, precision slit coating, heating baking, and online film thickness measurement. It can continuously complete substrate loading, surface treatment, coating film formation, and drying testing, realizing a complete process closed loop and helping customers achieve a multi-variety, fast-switching, and low-cost product development model.

In terms of core technology, in view of the requirement that Micro LED functional layer coating is extremely sensitive to film thickness and the "climbing" distance of the coating start section must be extremely short; Dehu said that the company has developed a new precision liquid supply pump system, liquid supply system and supporting process software, successfully achieving rapid ramping and uniformity of the film layer. The target film thickness can be quickly reached in the initial coating section, and the film thickness uniformity within and between chips is maintained.

Data show that Dehu Coating Equipment was established in 2014 and is mainly engaged in the research and development and manufacturing of precision coating equipment in the fields of perovskite batteries, flat panel displays, and advanced packaging of integrated circuits. This move from traditional flat panel display to Micro LED track reflects that the company's coating equipment landscape is continuing to extend along the underlying logic of precision film forming technology.

It is understood that Dehu Coating Equipment announced the completion of tens of millions of yuan in financing in June 2025, and made it clear that it will focus on entering strategic emerging fields such as semiconductors and flat panel displays in the future. Among them, in the field of flat panel display, companies will target cutting-edge directions such as flexible screens and Mini/Micro LEDs.

In addition to the successful delivery of the first set of Micro Led coating equipment this year, in the display field this year, the company also announced in March that it had received an order for a complete set of equipment such as G5 generation mass production coating, (H)VCD, HP, cleaning, development, and oven from the panel head company. It also received an order for a complete set of large-size coating equipment for mass production in the display field.