China Microelectronics Corporation releases MOCVD equipment dedicated to MicroLED

During SEMICON China 2026, AMEC released four new products for key processes of silicon-based and compound semiconductors, including the new generation inductively coupled ICP plasma etching equipment Primo Angnova™, the highly selective etching machine Primo Domingo™, Smart RF Match intelligent radio frequency matcher, and the MOCVD equipment Preciomo Udx® for the mass production of blue-green Micro LEDs.

Among them, in response to the requirements for wavelength uniformity and particle control during the mass production of Micro LED, China Microelectronics Corporation launched Preciomo Udx® MOCVD equipment.

This equipment has been redesigned in terms of gas transportation, heating mode and temperature field control. Compared with the traditional vertical airflow MOCVD structure, it adopts a horizontal double rotating reaction chamber scheme, combined with temperature field and flow field simulation and process optimization, to improve the uniformity performance during the epitaxial growth process.

In terms of mass production adaptation, Preciomo Udx® can be configured with up to two reaction chambers, which can process 18 6-inch or 12 8-inch gallium nitride blue-green Micro LED epitaxial wafers at the same time. Each reaction chamber supports independent control, which helps improve the flexibility of the production line. At the same time, the equipment is equipped with EFEM and SMIF systems to realize automatic transmission from cassette to cassette, reducing the risk of particle introduction during the epitaxy process to a certain extent.

According to the data, China Microelectronics Corporation is a high-end micro-processing equipment company based in China and facing the world, providing extremely high-end equipment and services for the integrated circuit and pan-semiconductor industries.

In 2025, the company will achieve total operating income of 12.385 billion yuan, a year-on-year increase of 36.62%; net profit attributable to shareholders of listed companies is 2.111 billion yuan, a year-on-year increase of 30.69%. During the reporting period, the sales of plasma etching equipment were approximately 9.832 billion yuan, a year-on-year increase of 35.12%; the sales of LPCVD and ALD equipment were approximately 506 million yuan, a significant year-on-year increase of 224.23%.

In terms of product research and development, the company will continue to promote the development of new products in 2025. In the past two years, more than ten types of conductor and dielectric film equipment have been added, many of which have been launched and have received some repeat orders. Among them, the cumulative shipment of LPCVD equipment exceeds 300 reaction units, the research and development of other key thin film deposition equipment is steadily advancing, and the EPI equipment has entered the client mass production verification stage.

In addition, the company has made progress in the research and development of special MOCVD equipment in Micro LED and other display fields, and a number of new products have entered client verification; new 8-inch silicon carbide epitaxial equipment and red and yellow LED application equipment have been shipped to domestic customers for verification. In terms of production capacity, production and R&D bases of approximately 140,000 square meters in Nanchang and 180,000 square meters in Lingang, Shanghai have been put into use. (Compiled by LEDinside)

▶ LEDinside’s latest activities, click on the image below to view the latest agenda and register for free

△Click on the image to view the meeting agenda

Please indicate the source when reprinting! For more LED information, please pay attention to the official website (www.ledinside.cn) or search the WeChat public account (LEDinside).